Electron Energy in Electron Induced Permeation

A measurement of electron energy has been carried out using a RFEA technique. The averaged electron energies in a RF discharge plasma were evaluated to be 20 ∼ 35 eV under 2 ∼ 8 Pa for D₂ gas and the RF power of 100 W. It became very clear that the electron energies were large enough to dissociate the hydrogen molecules.